Substrates

 

The properties of the substrate material are significant for most HTS applications. For example, the performance of a RF filter strongly depends on the dielectric constant and the losses at high frequency.

In below table we summarized the most important parameters of commonly available substrate materials used for HTS film deposition.

 

If you are not sure which substrate is best for your application, simply ask us!

 

 

Properties of common substrate materials

 

Substrate Material Maximum Size Buffer layer Dielectric constant tan delta Max film thickness
MgO 3" none 9,7

2×10-6

3 µm
Sapphire (r-cut) 200 mm CeO2 11,6/9,4 <10-6 350 nm
LaAlO3 3" CeO2 23,6 10-5 3 µm
YSZ (ZrO2:Y2O3) 2" CeO2 or Y2O3 27 10-3 1 µm
SrTiO3 1" CeO2 2000 10-3 1 µm
NdGaO3 2" CeO2 23 3×10-4 1 µm
YAlO3 1" CeO2 15,5 2×10-6 < 500 nm
LSAT 1" CeO2 22,7 2×10-4 1 µm